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The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering 期刊论文
Diamond & Related Materials, 2020, 期号: 109, 页码: 108018
Authors:  Pei LL(裴露露);  Ju PF(鞠鹏飞);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Xue DS(薛德胜);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(2891Kb)  |  Favorite  |  View/Download：62/0  |  Submit date：2020/12/03
Methane  Target poisoning  Fullerene-like nanostructure  Hydrogenated carbon films  Reactive magnetron sputtering  
Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass 期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:  Wang, Linqing;  Wang, Weiyan;  Huang, Jinhua;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
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Mu C-si:h Thin Films  Magnetron Sputtering  Amorphous Incubation Layers  Low Temperature  
Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering 期刊论文
Tribology letters, 2013, 卷号: 49, 期号: 1, 页码: 47-59
Authors:  Chen JM(陈建敏);  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Wu YX(吴艳霞);  Lv YH(吕艳红);  Liu XH(刘晓红);  Fu YY(付英英);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Wang YJ(王永军)
Adobe PDF(1296Kb)  |  Favorite  |  View/Download：740/3  |  Submit date：2013/12/09
Magnetron Sputtering  Graphite-like Carbon  Titanium Carbides  Microstructure  Properties  
调制周期对CrAl/CrAlN多层薄膜结构及耐腐蚀性能的影响 期刊论文
中国表面工程, 2013, 卷号: 26, 期号: 5, 页码: 18-23
Authors:  吕艳红;  吉利;  刘流;  李红轩;  刘晓红;  陈建敏;  周惠娣
Adobe PDF(1476Kb)  |  Favorite  |  View/Download：400/2  |  Submit date：2013/12/10
磁控溅射  Cral/craln  多层薄膜  微观结构  耐腐蚀性能  Magnetron Sputtering  Multi-layer Films  Miscrostructure  Corrosion Resistance  
Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
Authors:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(553Kb)  |  Favorite  |  View/Download：95/1  |  Submit date：2015/10/19
Argon Ion Beam Assisted Magnetron Sputtering  Boron-doped A-si:h Thin Film  Dark Conductivity  
Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering 期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Ye YP(冶银平)
Adobe PDF(817Kb)  |  Favorite  |  View/Download：418/3  |  Submit date：2013/12/05
Magnetron Sputtering  A-c:h Film  Vacuum Annealing  Microstructure  Tribological Behavior  
Superior tribological properties of an amorphous carbon film with a graphite-like structure 期刊论文
Chinese Physics B, 2012, 卷号: 21, 期号: 1, 页码: 016101(1-9)
Authors:  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Liu XH(刘晓红);  Wu YX(吴艳霞);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(490Kb)  |  Favorite  |  View/Download：259/2  |  Submit date：2013/07/12
Magnetron Sputtering  Graphite-like Carbon Film  Microstructure  Performance  
CrN和CrAlN薄膜的微观结构及在不同介质中的摩擦学性能 期刊论文
中国表面工程, 2012, 卷号: 25, 期号: 6, 页码: 34-41
Authors:  付英英;  李红轩;  吉利;  刘晓红;  周惠娣;  陈建敏
Adobe PDF(1775Kb)  |  Favorite  |  View/Download：345/0  |  Submit date：2013/07/12
磁控溅射  Crn薄膜  Craln薄膜  摩擦磨损  Magnetron Sputtering  Crn Film  Craln Film  Friction And Wear  
非平衡磁控溅射制备类石墨碳膜及性能研究 期刊论文
物理学报, 2012, 卷号: 61, 期号: 5, 页码: 056103(1-7)
Authors:  王永军;  李红轩;  吉利;  刘晓红;  吴艳霞;  周惠娣;  陈建敏
Adobe PDF(577Kb)  |  Favorite  |  View/Download：295/0  |  Submit date：2013/07/12
磁控溅射  类石墨碳膜  微观结构  性能  Magnetron Sputtering  Graphite-like Carbon Film  Microstructure  Performance  
Study on the Tribological Properties of Graphite-like Amorphous Carbon Film under Different Testing Conditions 期刊论文
Rare Metal Materials and Engineering, 2012, 卷号: 41, 期号: 增刊:1, 页码: 359-365
Authors:  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Zhao F(赵飞);  Liu XH(刘晓红);  Wu YX(吴艳霞);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(677Kb)  |  Favorite  |  View/Download：305/2  |  Submit date：2013/07/12
Magnetron Sputtering  Graphite-like Carbon Film  Microstructure  Tribological Properties  Load Bearing Capacity