| Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering | |
| Department | 先进润滑与防护材料研究发展中心 |
Wu YX(吴艳霞)1,2 ; Li HX(李红轩)1; Ji L(吉利)1; Liu L(刘流)3; Ye YP(冶银平)1; Chen JM(陈建敏)1; Zhou HD(周惠娣)1; Ye YP(冶银平)
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| The second department | 固体润滑国家重点实验室 |
| 2013 | |
| Source Publication | Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology
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| ISSN | 1350-6501 |
| Volume | 227Issue:7Pages:729-737 |
| Abstract | Hydrogenated amorphous carbon films (a-C:H) were prepared on silicon and steel substrates by medium frequency unbalanced magnetron sputtering with argon (Ar) and methane (CH4) as the source gases. The effect of annealing temperature in vacuum on the microstructure as well as mechanical properties and tribological behavior of as-prepared a-C:H films were investigated. The friction and wear behaviors of the films in different environments (vacuum, N2, and air) were evaluated with a pin-on-disk tribometer; and their sliding lifetime in vacuum was discussed in relation to friction and wear mechanisms. Results show that annealing in vacuum at a low temperature of up to 200 ℃ causes little change in the microstructure and hardness of a-C:H films but reduces their internal stress and surface roughness to some extent. These annealed films exhibit excellent antiwear ability in all test environments and show promising potential as a kind of space lubricants. The film begins to release hydrogen and increases the content of graphite-like structure at about 300 ℃. As a result, a-C:H films annealed above 200 ℃ have increased surface roughness as well as reduced hardness, internal stress, and wear resistance in all test environments. |
| Keyword | Magnetron Sputtering A-c:h Film Vacuum Annealing Microstructure Tribological Behavior |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1177/1350650112469897 |
| Funding Organization | the National Natural Science Foundation of China (regular project grant nos 51175491;50705093;Innovative Group Fund grant no. 50421502) |
| Indexed By | SCI |
| If | 0.660 |
| Language | 英语 |
| Funding Project | 磨损与表面工程课题组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4464 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Ye YP(冶银平) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing, Peoples R China 3.Tianshui Normal Univ, Coll Life Sci & Chem, Tianshui, Peoples R China |
| Recommended Citation GB/T 7714 | Wu YX,Li HX,Ji L,et al. Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering[J]. Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology,2013,227(7):729-737. |
| APA | Wu YX.,Li HX.,Ji L.,Liu L.,Ye YP.,...&冶银平.(2013).Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering.Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology,227(7),729-737. |
| MLA | Wu YX,et al."Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering".Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology 227.7(2013):729-737. |
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| File Name/Size | DocType | Version | Access | License | ||
| JET：Effect of vacuum（817KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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