| Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering | |
| Department | 先进润滑与防护材料研究发展中心 |
Chen JM(陈建敏)1 ; Wang YJ(王永军)1,2; Li HX(李红轩)1; Ji L(吉利)1; Wu YX(吴艳霞)1,2; Lv YH(吕艳红)1,2; Liu XH(刘晓红)1; Fu YY(付英英)1,2; Zhou HD(周惠娣)1; Chen JM(陈建敏); Wang YJ(王永军)
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| The second department | 固体润滑国家重点实验室 |
| 2013 | |
| Source Publication | Tribology letters
 |
| ISSN | 1023-8883 |
| Volume | 49Issue:1Pages:47-59 |
| Abstract | A series of graphite-like carbon films with a titanium concentration of about 3.0 at.% were successfully deposited on silicon wafer substrates using an unbalanced magnetron sputtering system with different bias voltages. The microstructure, surface morphology, and properties of the titanium-containing graphite-like carbon films were subsequently studied using different characterization techniques. The results show that the resulting titanium-containing graphite-like carbon films are completely dominated by sp2 sites and that these films have moderate hardness, lowinternal stress, and superior tribological properties with low friction and a high load-bearing capacity. The hardness (H), elastic modulus (E), H/E, H3/E2, and internal stress of the titaniumcontaining graphite-like carbon films initially increase with increasing bias voltage, only to be followed by a decrease with further increases in the bias voltage. Tribologically, the studied carbon film shows a slight increase in friction with increasing bias voltage, while the wear rate initially decreases, followed by an obvious increase. The tribological properties of the studied titanium-containing graphite-like carbon films are greatly improved under the liquid paraffin-lubricated condition, achieving extremely low friction (～0.045) and wear (～10-9 mm3/Nm). The effect of bias voltage on the microstructure and properties of the titanium-containing graphite-like carbon films is discussed in detail. |
| Keyword | Magnetron Sputtering Graphite-like Carbon Titanium Carbides Microstructure Properties |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1007/s11249-012-0041-6 |
| Funding Organization | the National Natural Science Foundation of China (Grant No. 51175491;No. 50575217);the Innovative Group Foundation from NSFC (Grant No. 50421502);the National 973 Project (No. 2007 CB607601) |
| Indexed By | SCI |
| If | 2.151 |
| Language | 英语 |
| Funding Project | 磨损与表面工程课题组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4566 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Chen JM(陈建敏); Wang YJ(王永军) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Chen JM,Wang YJ,Li HX,et al. Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering[J]. Tribology letters,2013,49(1):47-59. |
| APA | Chen JM.,Wang YJ.,Li HX.,Ji L.,Wu YX.,...&王永军.(2013).Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering.Tribology letters,49(1),47-59. |
| MLA | Chen JM,et al."Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering".Tribology letters 49.1(2013):47-59. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| WYJ-TL.pdf（1296KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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