| Superior tribological properties of an amorphous carbon film with a graphite-like structure | |
| Department | 先进润滑与防护材料研究发展中心 |
Wang YJ(王永军)1,2; Li HX(李红轩)1 ; Ji L(吉利)1; Liu XH(刘晓红)1; Wu YX(吴艳霞)1,2; Zhou HD(周惠娣)1; Chen JM(陈建敏)1; Chen JM(陈建敏)
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| 2012 | |
| Source Publication | Chinese Physics B
 |
| ISSN | 1674-1056 |
| Volume | 21Issue:1Pages:016101(1-9) |
| Abstract | Amorphous carbon films with high sp2 concentrations are deposited by unbalanced magnetron sputtering with a narrow range of substrate bias voltage. Field emission scanning electron microscopes (FESEMs), high resolution transmission electron microscopes (HRTEMs), atomic force microscopes (AFMs), the Raman spectrometers, nanoindentation, and tribometers are subsequently used to characterize the microstructures and the properties of the resulting films. It is found that the present films are dominated by the sp2 sites. However, the films demonstrate a moderate hardness together with a low internal stress. The high hardness of the deposited film originates from the crosslinking of the sp2 clusters by the sp3 sites. The presence of the graphite-like clusters in the film structure may be responsible for the low internal stress. What is more important is that the resulting films show excellent tribological properties with high load capacity and excellent wear resistance in humid atmospheres. The relationship between the microstructure determined by the deposition condition and the film characteristic is discussed in detail. |
| Keyword | Magnetron Sputtering Graphite-like Carbon Film Microstructure Performance |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1088/1674-1056/21/1/016101 |
| Funding Organization | the National Natural Science Foundation of China (Grant Nos. 50705093;50575217);the Innovative Group Foundation of the National Natural Science Foundation of China (Grant No. 50421502);the National Basic Research Program of China (Grant No. 2007CB607601) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3314 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Chen JM(陈建敏) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Wang YJ,Li HX,Ji L,et al. Superior tribological properties of an amorphous carbon film with a graphite-like structure[J]. Chinese Physics B,2012,21(1):016101(1-9). |
| APA | Wang YJ.,Li HX.,Ji L.,Liu XH.,Wu YX.,...&陈建敏.(2012).Superior tribological properties of an amorphous carbon film with a graphite-like structure.Chinese Physics B,21(1),016101(1-9). |
| MLA | Wang YJ,et al."Superior tribological properties of an amorphous carbon film with a graphite-like structure".Chinese Physics B 21.1(2012):016101(1-9). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 016101.PDF（490KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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