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Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass 期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:  Wang, Linqing;  Wang, Weiyan;  Huang, Jinhua;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(800Kb)  |  Favorite  |  View/Download：86/1  |  Submit date：2015/10/26
Mu C-si:h Thin Films  Magnetron Sputtering  Amorphous Incubation Layers  Low Temperature  
Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
Authors:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(553Kb)  |  Favorite  |  View/Download：95/1  |  Submit date：2015/10/19
Argon Ion Beam Assisted Magnetron Sputtering  Boron-doped A-si:h Thin Film  Dark Conductivity