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Comparative study the tribology of amorphous carbon films via magnetron sputtering depending on the different magnetic field 期刊论文
Diamond & Related Materials, 2022, 卷号: 121, 期号: 8, 页码: 108780-108788
Authors:  Jia Qian;  Gao Kaixiong;  Zhang Bin
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Tribology  Amorphous carbon film  Magnetron sputtering  Magnetic field  
The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering 期刊论文
Diamond & Related Materials, 2020, 期号: 109, 页码: 108018
Authors:  Pei LL(裴露露);  Ju PF(鞠鹏飞);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红);  Xue DS(薛德胜);  Zhou HD(周惠娣);  Chen JM(陈建敏)
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Methane  Target poisoning  Fullerene-like nanostructure  Hydrogenated carbon films  Reactive magnetron sputtering  
Effect of Nb content on the microstructure and corrosion resistance of the sputtered Cr-Nb-N coatings 期刊论文
Journal of Alloys and Compounds, 2018, 卷号: 740, 期号: 0, 页码: 510-518
Authors:  Wang DS(王德生);  Fu YL(伏彦龙);  Hu M(胡明);  Jiang D(姜栋);  Gao XM(高晓明);  Wang QQ(王琴琴);  Yang J(杨军);  Sun JY(孙嘉奕);  Weng LJ(翁立军);  Hu M(胡明);  Sun JY(孙嘉奕)
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Corrosion Protection  Hard Coatings  Cr-nb-n Film  Magnetron Sputtering  
Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass 期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:  Wang, Linqing;  Wang, Weiyan;  Huang, Jinhua;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
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Mu C-si:h Thin Films  Magnetron Sputtering  Amorphous Incubation Layers  Low Temperature  
Ｎ2 流量对中频非平衡磁控溅射ＴｉＡｌＮ薄膜结构及性能的影响 期刊论文
功能材料, 2013, 卷号: 44, 期号: 1, 页码: 32-35
Authors:  吴劲峰;  何乃如;  邱孟柯;  吉利;  李红轩;  黄小鹏
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磁控溅射  Tialn 薄膜  N2 流量  微观结构  硬度  Magnetron Sputtering  Tialn Films  Nitrogen Flow  Microstructure  Hardness  
中频磁控溅射制备不同S/W 原子比WSx薄膜的结构和摩擦学性能研究 期刊论文
摩擦学学报, 2013, 卷号: 33, 期号: 5, 页码: 507-513
Authors:  徐书生;  高晓明;  胡明;  孙嘉奕;  翁立军;  刘维民
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中频磁控溅射  Wsx薄膜  S/w原子比  摩擦磨损  Medium Frequency Magnetron Sputtering  Wsx Film  S/w Ratio  Friction And Wear  
Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering 期刊论文
Tribology letters, 2013, 卷号: 49, 期号: 1, 页码: 47-59
Authors:  Chen JM(陈建敏);  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Wu YX(吴艳霞);  Lv YH(吕艳红);  Liu XH(刘晓红);  Fu YY(付英英);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Wang YJ(王永军)
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Magnetron Sputtering  Graphite-like Carbon  Titanium Carbides  Microstructure  Properties  
调制周期对CrAl/CrAlN多层薄膜结构及耐腐蚀性能的影响 期刊论文
中国表面工程, 2013, 卷号: 26, 期号: 5, 页码: 18-23
Authors:  吕艳红;  吉利;  刘流;  李红轩;  刘晓红;  陈建敏;  周惠娣
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磁控溅射  Cral/craln  多层薄膜  微观结构  耐腐蚀性能  Magnetron Sputtering  Multi-layer Films  Miscrostructure  Corrosion Resistance  
Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
Authors:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
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Argon Ion Beam Assisted Magnetron Sputtering  Boron-doped A-si:h Thin Film  Dark Conductivity  
Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering 期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Ye YP(冶银平)
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Magnetron Sputtering  A-c:h Film  Vacuum Annealing  Microstructure  Tribological Behavior