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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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中国科学院材料磨损与... [6]
固体润滑国家重点实验... [5]
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磨损与表面工程课题组 [6]
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磁控溅射制备氢化硅薄膜及其特性研究
学位论文
: 中国科学院大学, 2014
Authors:
王林青
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View/Download:378/1
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Submit date:2014/11/25
氢化硅薄膜
磁控溅射
辅助离子束
磷掺杂
硼掺杂
Hydrogenated Si Thin Films
Magnetron Sputtering
Assisted Ion Beam
P-doping
B-doping
Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass
期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:
Wang, Linqing
;
Wang, Weiyan
;
Huang, Jinhua
;
Zeng, Yuheng
;
Tan, Ruiqin
;
Song, Weijie
;
Chen JM(陈建敏)
;
Chen JM(陈建敏)
Adobe PDF(800Kb)
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Submit date:2015/10/26
Mu C-si:h Thin Films
Magnetron Sputtering
Amorphous Incubation Layers
Low Temperature
N2 流量对中频非平衡磁控溅射TiAlN薄膜结构及性能的影响
期刊论文
功能材料, 2013, 卷号: 44, 期号: 1, 页码: 32-35
Authors:
吴劲峰
;
何乃如
;
邱孟柯
;
吉利
;
李红轩
;
黄小鹏
Adobe PDF(880Kb)
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Submit date:2013/12/10
磁控溅射
Tialn 薄膜
N2 流量
微观结构
硬度
Magnetron Sputtering
Tialn Films
Nitrogen Flow
Microstructure
Hardness
Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering
期刊论文
Tribology letters, 2013, 卷号: 49, 期号: 1, 页码: 47-59
Authors:
Chen JM(陈建敏)
;
Wang YJ(王永军)
;
Li HX(李红轩)
;
Ji L(吉利)
;
Wu YX(吴艳霞)
;
Lv YH(吕艳红)
;
Liu XH(刘晓红)
;
Fu YY(付英英)
;
Zhou HD(周惠娣)
;
Chen JM(陈建敏)
;
Wang YJ(王永军)
Adobe PDF(1296Kb)
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Submit date:2013/12/09
Magnetron Sputtering
Graphite-like Carbon
Titanium Carbides
Microstructure
Properties
调制周期对CrAl/CrAlN多层薄膜结构及耐腐蚀性能的影响
期刊论文
中国表面工程, 2013, 卷号: 26, 期号: 5, 页码: 18-23
Authors:
吕艳红
;
吉利
;
刘流
;
李红轩
;
刘晓红
;
陈建敏
;
周惠娣
Adobe PDF(1476Kb)
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Submit date:2013/12/10
磁控溅射
Cral/craln
多层薄膜
微观结构
耐腐蚀性能
Magnetron Sputtering
Multi-layer Films
Miscrostructure
Corrosion Resistance
Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering
期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:
Wu YX(吴艳霞)
;
Li HX(李红轩)
;
Ji L(吉利)
;
Liu L(刘流)
;
Ye YP(冶银平)
;
Chen JM(陈建敏)
;
Zhou HD(周惠娣)
;
Ye YP(冶银平)
Adobe PDF(817Kb)
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Submit date:2013/12/05
Magnetron Sputtering
A-c:h Film
Vacuum Annealing
Microstructure
Tribological Behavior