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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics，Chinese Academy of Sciences
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固体润滑国家重点实验... [1]
中国科学院材料磨损与... [1]
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摩擦学学报 [1]
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PVD润滑薄膜组;高... [1]
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伏彦龙 [1]
刘维民 [1]
张立平 [1]
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翁立军 [1]
胡明 [1]
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2013 [1]
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基体偏压对反应磁控溅射ZrN/α-SiNx纳米多层薄膜结构及性能的影响
期刊论文
摩擦学学报, 2013, 卷号: 33, 期号: 1, 页码: 29-35
Authors:
胡明
;
高晓明
;
张立平
;
伏彦龙
;
杨军
;
翁立军
;
刘维民
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Submit date：2013/12/11
Zrn/α-sinx纳米多层薄膜
基体偏压
微观结构
机械及摩擦学性能
Zrn/α-sinx Nanoscaled Multilayer Films
Bias Voltage
Mirostructure
Mechanical And Tribological Properties
