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Ｎ2 流量对中频非平衡磁控溅射ＴｉＡｌＮ薄膜结构及性能的影响 期刊论文
功能材料, 2013, 卷号: 44, 期号: 1, 页码: 32-35
Authors:  吴劲峰;  何乃如;  邱孟柯;  吉利;  李红轩;  黄小鹏
Adobe PDF(880Kb)  |  Favorite  |  View/Download：305/3  |  Submit date：2013/12/10
磁控溅射  Tialn 薄膜  N2 流量  微观结构  硬度  Magnetron Sputtering  Tialn Films  Nitrogen Flow  Microstructure  Hardness  
Microstructure, Morphology and Properties of Titanium Containing Graphite-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering 期刊论文
Tribology letters, 2013, 卷号: 49, 期号: 1, 页码: 47-59
Authors:  Chen JM(陈建敏);  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Wu YX(吴艳霞);  Lv YH(吕艳红);  Liu XH(刘晓红);  Fu YY(付英英);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Wang YJ(王永军)
Adobe PDF(1296Kb)  |  Favorite  |  View/Download：740/3  |  Submit date：2013/12/09
Magnetron Sputtering  Graphite-like Carbon  Titanium Carbides  Microstructure  Properties  
调制周期对CrAl/CrAlN多层薄膜结构及耐腐蚀性能的影响 期刊论文
中国表面工程, 2013, 卷号: 26, 期号: 5, 页码: 18-23
Authors:  吕艳红;  吉利;  刘流;  李红轩;  刘晓红;  陈建敏;  周惠娣
Adobe PDF(1476Kb)  |  Favorite  |  View/Download：400/2  |  Submit date：2013/12/10
磁控溅射  Cral/craln  多层薄膜  微观结构  耐腐蚀性能  Magnetron Sputtering  Multi-layer Films  Miscrostructure  Corrosion Resistance  
Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering 期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Ye YP(冶银平)
Adobe PDF(817Kb)  |  Favorite  |  View/Download：418/3  |  Submit date：2013/12/05
Magnetron Sputtering  A-c:h Film  Vacuum Annealing  Microstructure  Tribological Behavior