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TiN/TiCN multilayer films modified by argon plasma treatment 期刊论文
Applied Surface Science, 2013, 卷号: 280, 页码: 764-771
Authors:  Zheng JY(郑建云);  Hao JY(郝俊英);  Liu XQ(刘小强);  Gong QY(龚秋雨);  Liu WM(刘维民);  Hao JY(郝俊英)
Adobe PDF(3875Kb)  |  Favorite  |  View/Download：364/4  |  Submit date：2013/12/18
Tin/ticn Multilayer Film  Argon Plasma Treatment  Structure  Mechanical And Tribological Properties  
基体偏压对反应磁控溅射ZrN/α-SiNx纳米多层薄膜结构及性能的影响 期刊论文
摩擦学学报, 2013, 卷号: 33, 期号: 1, 页码: 29-35
Authors:  胡明;  高晓明;  张立平;  伏彦龙;  杨军;  翁立军;  刘维民
Adobe PDF(950Kb)  |  Favorite  |  View/Download：391/4  |  Submit date：2013/12/11
Zrn/α-sinx纳米多层薄膜  基体偏压  微观结构  机械及摩擦学性能  Zrn/α-sinx Nanoscaled Multilayer Films  Bias Voltage  Mirostructure  Mechanical And Tribological Properties