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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [5]
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中频磁控溅射制备a-C∶H(Al,W) 薄膜及其性能研究
期刊论文
摩擦学学报, 摩擦学学报, 2013, 2013, 卷号: 33, 33, 期号: 6, 页码: 556-564, 556-564
Authors:
龚秋雨
;
郝俊英
;
刘小强
;
刘维民
Adobe PDF(2738Kb)
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Submit date:2013/12/18
中频磁控溅射
中频磁控溅射
摩擦磨损
A-c∶h(al
摩擦磨损
A-c∶h(al
力学性能
W)薄膜
力学性能
W)薄膜
Medium Frequency Magnetron Sputtering
Medium Frequency Magnetron Sputtering
Friction And Wear
A-c∶h(al
Friction And Wear
A-c∶h(al
Mechanical Properties
W)films
Mechanical Properties
W)films
中频磁控溅射制备不同S/W 原子比WSx薄膜的结构和摩擦学性能研究
期刊论文
摩擦学学报, 2013, 卷号: 33, 期号: 5, 页码: 507-513
Authors:
徐书生
;
高晓明
;
胡明
;
孙嘉奕
;
翁立军
;
刘维民
Adobe PDF(869Kb)
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Submit date:2013/12/23
中频磁控溅射
Wsx薄膜
S/w原子比
摩擦磨损
Medium Frequency Magnetron Sputtering
Wsx Film
S/w Ratio
Friction And Wear
Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering
期刊论文
Applied Surface Science, 2011, 卷号: 257, 期号: 无期, 页码: 2269-2274
Authors:
Kong QH(孔庆花)
;
Ji L(吉利)
;
Li HX(李红轩)
;
Liu XH(刘晓红)
;
Wang YJ(王永军)
;
Chen JM(陈建敏)
;
Zhou HD(周惠娣)
Adobe PDF(921Kb)
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Submit date:2012/09/24
Crnx FIlms
Medium Frequency Magnetron Sputtering
N2 Content
Microstructure
Mechanical Properties
Tribological Properties
中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究
期刊论文
摩擦学学报, 2008, 卷号: 28, 期号: 2, 页码: 118-122
Authors:
张广安
;
王鹏
;
陈友明
;
王霞
;
阎鹏勋
;
张俊彦
Adobe PDF(603Kb)
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Submit date:2013/03/28
中频磁控溅射
Al-dlc薄膜
摩擦磨损性能
Medium Frequency Magnetron Sputtering
Al-dlc Thin Films
Tribological Properties
Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films
期刊论文
Materials Science and Engineering A, 2007, 卷号: 460-461, 页码: 301-305
Authors:
Zhang GA(张广安)
;
Yan PX(阎鹏勋)
;
Wang P(王鹏)
;
Chen YM(陈友明)
;
Zhang JY(张俊彦)
Adobe PDF(358Kb)
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Submit date:2013/11/01
Twin Target Medium Frequency Magnetron Sputtering
Crnx Films
Deposition Rate
Structure
Wear Properties