| Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films | |
| Department | 固体润滑国家重点实验室 |
Zhang GA(张广安) ; Yan PX(阎鹏勋); Wang P(王鹏); Chen YM(陈友明); Zhang JY(张俊彦)
| |
| 2007 | |
| Source Publication | Materials Science and Engineering A
 |
| ISSN | 0921-5093 |
| Volume | 460-461Pages:301-305 |
| Abstract | CrNx films were prepared using 20 kHz medium magnetron frequency magnetron sputtering in order to analyze the structural and mechanical features regarding to N2 content variations. XRD diffraction patterns reveal that only Cr phase with strong [1 1 1] orientation is observed for 0% nitrogen contents, the mixed Cr2N and Cr phases appear at 20% nitrogen content, while for 40% N2 content, no crystal structure feature is seen, indicating that an amorphous phase is generated. Further increasing the nitrogen content to 60% or above, only CrN phase appeared. SEM image shows a columnar-type structure lying in the transition zone between T and I zones of Thornton Model for the films. The critical load (Lc) are 23 and 14 g for the Cr films and CrNx (x > 0) films, respectively. The Cr film (0% N2 content) shows a low friction coefficient against the steel ball, but much higher against the Si3N4 ball. The friction coefficient of the CrNx films is lower in the range of nitrogen content from 20 and 40%, and then reached about 0.7, no obvious changes was observed with the N2 content further increasing. |
| Keyword | Twin Target Medium Frequency Magnetron Sputtering Crnx Films Deposition Rate Structure Wear Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the “Hundred Talents Program” of Chinese Academy of Sciences;the National Natural Science Foundation of China (Granted Nos.: 50323007;50572108);the Innovative Group Foundation from NSFC(Grant No. 50421502) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 纳米润滑研究组 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4031 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang JY(张俊彦) |
| Recommended Citation GB/T 7714 | Zhang GA,Yan PX,Wang P,et al. Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films[J]. Materials Science and Engineering A,2007,460-461:301-305. |
| APA | 张广安,阎鹏勋,王鹏,陈友明,&张俊彦.(2007).Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films.Materials Science and Engineering A,460-461,301-305. |
| MLA | 张广安,et al."Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films".Materials Science and Engineering A 460-461(2007):301-305. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2007301-305.pdf（358KB） | 开放获取 | CC BY-NC-SA | View Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment