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中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究
Department固体润滑国家重点实验室
张广安; 王鹏; 陈友明; 王霞; 阎鹏勋; 张俊彦
2008
Source Publication摩擦学学报
ISSN1004-0595
Volume28Issue:2Pages:118-122
Abstract摘要: 采用中频磁控溅射技术在单晶硅表面制备含铝类金刚石 (Al-DLC)薄膜, 利用原子力显微镜、X射线光电子能谱仪、红外光谱仪、纳米压痕仪和微摩擦磨损试验机等考察薄膜表面形貌、结构及其摩擦磨损性能. 结果表明: 所制备的Al-DLC薄膜均匀、致密, 表面粗糙度小, 应力较低, 硬度较高; 薄膜与 Si3N4陶瓷球对摩时显示出良好抗磨减摩性能; 加基底偏压所制备薄膜的摩擦系数明显降低, 耐磨寿命显著提高.
Keyword中频磁控溅射 Al-dlc薄膜 摩擦磨损性能 Medium Frequency Magnetron Sputtering Al-dlc Thin Films Tribological Properties
Subject Area材料科学与物理化学
Funding Organization国家自然科学基金资助项目(50572108;50772115);中国科学院“ 百人计划” 资助项目
Indexed ByEI ; CSCD
Language中文
Funding Project低维材料摩擦学组 ; 纳米润滑研究组
Citation statistics
Cited Times:11[CSCD]   [CSCD Record]
Document Type期刊论文
Identifierhttp://ir.licp.cn/handle/362003/2755
Collection固体润滑国家重点实验室(LSL)
Corresponding Author张俊彦
Recommended Citation
GB/T 7714
张广安,王鹏,陈友明,等. 中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究[J]. 摩擦学学报,2008,28(2):118-122.
APA 张广安,王鹏,陈友明,王霞,阎鹏勋,&张俊彦.(2008).中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究.摩擦学学报,28(2),118-122.
MLA 张广安,et al."中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究".摩擦学学报 28.2(2008):118-122.
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