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Research on the properties of ZnO thin films deposited by using filtered cathodic arc plasma technique on glass substrate under different flow rate of O2 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4000-4005
Authors:  Li C(李春);  Li XC(李晓春);  Yan PX(阎鹏勋);  Chong EM(崇二敏);  Liu Y(刘洋);  Yue GH(岳光辉);  Fan XY(范晓彦)
Adobe PDF(578Kb)  |  Favorite  |  View/Download：69/1  |  Submit date：2013/11/01
Zno Thin Films  Filtered Cathodic Arc Plasma  Tensile Stress  Electrical Resistivity  Photoluminescence  
Al/AlN多层膜的摩擦磨损性能研究 期刊论文
摩擦学学报, 2007, 卷号: 27, 期号: 3, 页码: 204-209
Authors:  张广安;  吴志国;  王明旭;  范晓彦;  王君;  阎鹏勋
Adobe PDF(877Kb)  |  Favorite  |  View/Download：222/0  |  Submit date：2013/11/01
磁控溅射  Al/aln多层膜  摩擦磨损性能  Magnetron Sputtering  Al/aln Multilayer  Friction And Wear Behavior  
Structure evolution and mechanical properties enhancement of Al/AlN multilayer 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 8835-8840
Authors:  Zhang GA(张广安);  Wu ZG(吴志国);  Wang MX(王明旭);  Fan XY(范晓彦);  Wang J(王君);  Yan PX(阎鹏勋)
Adobe PDF(869Kb)  |  Favorite  |  View/Download：85/0  |  Submit date：2013/11/01
Magnetron Sputtering  Al/aln Multilayer  Structure  Hardness  Wear Properties  
Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films 期刊论文
Materials Science and Engineering A, 2007, 卷号: 460-461, 页码: 301-305
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张俊彦)
Adobe PDF(358Kb)  |  Favorite  |  View/Download：279/3  |  Submit date：2013/11/01
Twin Target Medium Frequency Magnetron Sputtering  Crnx Films  Deposition Rate  Structure  Wear Properties