| Structure evolution and mechanical properties enhancement of Al/AlN multilayer | |
| Department | 固体润滑国家重点实验室 |
Zhang GA(张广安) ; Wu ZG(吴志国); Wang MX(王明旭); Fan XY(范晓彦); Wang J(王君); Yan PX(阎鹏勋)
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| 2007 | |
| Source Publication | Applied Surface Science
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| ISSN | 0169-4332 |
| Volume | 253Pages:8835-8840 |
| Abstract | A set of Al/AlN multilayers with various modulation periods were prepared using DC magnetron sputtering method. Low angle X-ray diffraction (LAXRD) was used to analyze the layered structure of multilayers. The phase structure of the films was investigated with grazing angle X-ray diffraction (GAXRD). LAXRD results indicate that well-defined multilayer modulation structures are formed for the relatively larger modulation periods. However, the loss of mutilayered structure is detected in the multilayer with low modulation period. Avery wide amorphous peak is observed in multilayer with modulation period of 4 nm. The multilayers show obvious crystallization at larger modulation periods, however, the diffraction peaks are much wider than the Al single layer because of the interruption of the continuous columnar grain growth by alternating deposition processes. Nanoindentation experiments were performed to study the mechanical properties as a function of multilayer modulation period. It is found that the hardness of the multilayers is greater than the hardness calculated from rule of mixtures.With the modulation periods adjusted, the multilayers are even harder than its hard component (AlN). A maximum hardness of 24.9 GPa, about 1.9 times larger than its hard component (AlN) and 3.7 times larger than the hardness calculated from the rule of mixtures, is found at the multilayer with modulation period of 16 nm. The wear test results show that the multilayers possess lower and stable friction coefficient, and superior wear properties. |
| Keyword | Magnetron Sputtering Al/aln Multilayer Structure Hardness Wear Properties |
| Subject Area | 材料科学与物理化学 |
| Indexed By | SCI |
| Language | 英语 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/4102 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Yan PX(阎鹏勋) |
| Recommended Citation GB/T 7714 | Zhang GA,Wu ZG,Wang MX,et al. Structure evolution and mechanical properties enhancement of Al/AlN multilayer[J]. Applied Surface Science,2007,253:8835-8840. |
| APA | 张广安,吴志国,王明旭,范晓彦,王君,&阎鹏勋.(2007).Structure evolution and mechanical properties enhancement of Al/AlN multilayer.Applied Surface Science,253,8835-8840. |
| MLA | 张广安,et al."Structure evolution and mechanical properties enhancement of Al/AlN multilayer".Applied Surface Science 253(2007):8835-8840. |
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| File Name/Size | DocType | Version | Access | License | ||
| 20078835-8840.pdf（869KB） | 开放获取 | CC BY-NC-SA | View Application Full Text | |||
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