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High temperature tribological properties of TiAlSiN coatings produced by hybrid PVD technology 期刊论文
Tribology International, 2016, 卷号: 98, 页码: 133-143
Authors:  He NR(何乃如);  Li HX(李红轩);  Ji L(吉利);  Liu XH(刘晓红);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Li HX(李红轩);  Chen JM(陈建敏)
Adobe PDF(4480Kb)  |  Favorite  |  View/Download：138/2  |  Submit date：2016/08/19
Tialsin Coatings  Friction And Wear  High Temperature  
磁控溅射制备氢化硅薄膜及其特性研究 学位论文
: 中国科学院大学, 2014
Authors:  王林青
Adobe PDF(6254Kb)  |  Favorite  |  View/Download：378/1  |  Submit date：2014/11/25
氢化硅薄膜  磁控溅射  辅助离子束  磷掺杂  硼掺杂  Hydrogenated Si Thin Films  Magnetron Sputtering  Assisted Ion Beam  P-doping  B-doping  
Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass 期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:  Wang, Linqing;  Wang, Weiyan;  Huang, Jinhua;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(800Kb)  |  Favorite  |  View/Download：87/1  |  Submit date：2015/10/26
Mu C-si:h Thin Films  Magnetron Sputtering  Amorphous Incubation Layers  Low Temperature  
Structure, Mechanical, and Tribological Properties of MoS2/a-C:H Composite Films 期刊论文
Tribology letters, 2013, 卷号: 52, 期号: 3, 页码: 371-380
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Li HX(李红轩)
Adobe PDF(935Kb)  |  Favorite  |  View/Download：489/7  |  Submit date：2013/12/05
Mos2/a-c:h Film  Ar/ch4 Ratio  Tribological Properties  
Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering 期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Ye YP(冶银平)
Adobe PDF(817Kb)  |  Favorite  |  View/Download：421/3  |  Submit date：2013/12/05
Magnetron Sputtering  A-c:h Film  Vacuum Annealing  Microstructure  Tribological Behavior