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磁控溅射制备氢化硅薄膜及其特性研究 学位论文
: 中国科学院大学, 2014
Authors:  王林青
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氢化硅薄膜  磁控溅射  辅助离子束  磷掺杂  硼掺杂  Hydrogenated Si Thin Films  Magnetron Sputtering  Assisted Ion Beam  P-doping  B-doping  
Low temperature magnetron sputtering deposition of hydrogenated microcrystalline silicon thin films without amorphous incubation layers on glass 期刊论文
Journal of Non-Crystalline Solids, 2014, 卷号: 388, 页码: 86-90
Authors:  Wang, Linqing;  Wang, Weiyan;  Huang, Jinhua;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
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Mu C-si:h Thin Films  Magnetron Sputtering  Amorphous Incubation Layers  Low Temperature  
Preparation and Characterization of Cu2ZnSn(SxSe1-x)(4) Thin Films by Synchronous Sulfo-Selenization of Single-Source Evaporated Metallic Precursors 期刊论文
Acta Metallurgica Sinica, 2014, 卷号: 27, 期号: 4, 页码: 689-693
Authors:  Jiang X(姜欣);  Shao, Lexi;  Zhang, Jun;  Chen JM(陈建敏);  Chen JM(陈建敏)
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Evaporation  Cu2znsn(s  Sulfo-selenization  Se)(4)  Thin Film