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Comparative study on structure and properties of titanium/silicon mono- and co-doped amorphous carbon films deposited by mid-frequency magnetron sputtering 期刊论文
Surface and Interface Analysis, 2014, 卷号: 46, 期号: 3, 页码: 139-144
Authors:  Jiang JL(姜金龙);  Huang H(黄浩);  Wang Q(王琼);  Zhu WJ(朱伟军);  Hao JY(郝俊英);  Liu WM(刘维民);  Jiang JL(姜金龙)
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A-c:h Films  Co-doping  Microstructure  Tribological Properties  
Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum 期刊论文
Journal of Applied Physics, 2011, 卷号: 110, 页码: 53507(1-8)
Authors:  Liu XQ(刘小强);  Hao JY(郝俊英);  Yang J(杨军);  Zheng JY(郑建云);  Liang YM(梁永民);  Liu WM(刘维民);  Hao JY(郝俊英)
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Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD 期刊论文
Journal of Materials Science, 2008, 卷号: 43, 页码: 645-651
Authors:  Ding J(丁军);  Hao JY(郝俊英);  Xue QJ(薛群基);  Liu WM(刘维民)
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Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system 期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
Authors:  Hao JY(郝俊英);  Liu WM(刘维民);  Xue QJ(薛群基)
Adobe PDF(201Kb)  |  Favorite  |  View/Download：272/2  |  Submit date：2013/11/01
Films And Coatings  Chemical Vapor Deposition  Plasma Deposition  Vapor Phase Deposition  Hardness  Indentation  Microindentation  Microstructure  Ftir Measurements  Xps