| Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD | |
| Department | 固体润滑国家重点实验室 |
Ding J(丁军); Hao JY(郝俊英) ; Xue QJ(薛群基); Liu WM(刘维民)
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| 2008 | |
| Source Publication | Journal of Materials Science
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| ISSN | 0022-2461 |
| Volume | 43Pages:645-651 |
| Abstract | Hydrogenated carbon nitride (a-CNxH films) was deposited on n-type single-crystal Si (100) by direct current radio frequency plasma-enhanced chemical vapor deposition (DC-RF-PECVD), under the working pressure of 5.0–17.0 Pa, using the CH4 and N2 as feedstock. The composition and surface morphology of the a-CNxH films were characterized by means of Raman spectroscopy and atomic force microscopy, while the Young’s modulus, elastic recovery, adhesion strength, and tribological properties were evaluated using nano-indentation, scratch test and friction test system. It was found that the surface roughness and Raman spectra peak intensity ratio ID/IG of the films increased with the increase of working pressure, while the Young’s modulus, elastic recovery and adhesion strength of the films significantly decreased. Moreover, the tribological properties of the films also varied with the working pressure. The wear life sharply increased with the increase of working pressure from 5.0 Pa to 7.5 Pa, further, an increase in the deposition pressure led to a gradual decrease in the wear life, consequently, the a-CNxH film deposited at 7.5 Pa exhibited the longest wear life. The deposition pressure seemed to have slight effect on the average friction coefficients, whereas the surface roughness and adhesion strength have deteriorated with increasing deposition pressure. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant No. 50405040 and No. 50432020);‘‘973’’ program of China (Grant No. 2007CB607601);the Innovative Group Foundation from NSFC (Grant No. 50421502) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 空间润滑材料组 ; 低维材料摩擦学组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2637 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Recommended Citation GB/T 7714 | Ding J,Hao JY,Xue QJ,et al. Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD[J]. Journal of Materials Science,2008,43:645-651. |
| APA | 丁军,郝俊英,薛群基,&刘维民.(2008).Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD.Journal of Materials Science,43,645-651. |
| MLA | 丁军,et al."Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD".Journal of Materials Science 43(2008):645-651. |
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| 2008645-651.pdf（518KB） | 开放获取 | License | View Application Full Text | |||
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