| Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum | |
| Department | 固体润滑国家重点实验室 |
Liu XQ(刘小强) ; Hao JY(郝俊英); Yang J(杨军); Zheng JY(郑建云); Liang YM(梁永民); Liu WM(刘维民); Hao JY(郝俊英)
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| 2011 | |
| Source Publication | Journal of Applied Physics
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| ISSN | 0021-8979 |
| Volume | 110Pages:53507(1-8) |
| Abstract | Silicon (Si) and aluminum (Al) co-doped amorphous carbon films ((Si, Al)–C:H) were deposited on Si and stainless steel substrates by radio frequency (13.56 MHz) magnetron sputtering. The Al and Si were found to jointly regulate the hybridized carbon bonds. Mechanical properties of the films were detected by nano-indention and scratch tests. The nano-indention results revealed that all the samples exhibited good elastic recovery rate, among which the highest one was beyond 84%. Besides co-regulating the hybridizations of carbon, the co-doped Si and Al also had a common regulation on the mechanical and tribological properties. Especially, the film containing 1.6 at. % of Si and 0.9 at. % of Al showed a super-low friction (< 0.01) and a superior wear resistance in ambient air. |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant NO.50905177);the National 973 Project of China (Grant NO.2007CB607601) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3249 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Recommended Citation GB/T 7714 | Liu XQ,Hao JY,Yang J,et al. Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum[J]. Journal of Applied Physics,2011,110:53507(1-8). |
| APA | Liu XQ.,Hao JY.,Yang J.,Zheng JY.,Liang YM.,...&郝俊英.(2011).Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum.Journal of Applied Physics,110,53507(1-8). |
| MLA | Liu XQ,et al."Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum".Journal of Applied Physics 110(2011):53507(1-8). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 201153507.PDF（1770KB） | 开放获取 | CC BY-NC-SA | View Application Full Text | |||
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