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Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages 期刊论文
Surface & Coatings Technology, 2012, 卷号: 206, 期号: 19-20, 页码: 4119-4125
Authors:  Liu XQ(刘小强);  Yang J(杨军);  Hao JY(郝俊英);  Zheng JY(郑建云);  Gong QY(龚秋雨);  Liu WM(刘维民);  Hao JY(郝俊英)
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Bias Voltage  Magnetron Sputtering  Surface Morphology  Wear Resistance  Super-low Friction  Amorphous Carbon Film  
Effect of deposition pressure on the adhesion and tribological properties of a-CNxH films prepared by DC-RF-PECVD 期刊论文
Journal of Materials Science, 2008, 卷号: 43, 页码: 645-651
Authors:  Ding J(丁军);  Hao JY(郝俊英);  Xue QJ(薛群基);  Liu WM(刘维民)
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Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system 期刊论文
Journal of Non-Crystalline Solids, 2007, 卷号: 353, 页码: 136-142
Authors:  Hao JY(郝俊英);  Liu WM(刘维民);  Xue QJ(薛群基)
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Films And Coatings  Chemical Vapor Deposition  Plasma Deposition  Vapor Phase Deposition  Hardness  Indentation  Microindentation  Microstructure  Ftir Measurements  Xps  
Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasms system 期刊论文
Materials and Science Engineering A, 2005, 卷号: 408, 页码: 297-302
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
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Carbon Nitride Films  Pecvd  Composition  Mechanical Properties  
Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD 期刊论文
Journal of Non-Crystalline Solids, 2005, 卷号: 351, 页码: 3671-3676
Authors:  Hao JY(郝俊英);  Xu T(徐洮);  Liu WM(刘维民);  Liu WM(刘维民)
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