| Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages | |
| Department | 固体润滑国家重点实验室 |
Liu XQ(刘小强)1,2 ; Yang J(杨军)1; Hao JY(郝俊英)1; Zheng JY(郑建云)1,2; Gong QY(龚秋雨)1,2; Liu WM(刘维民)1; Hao JY(郝俊英)
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| 2012 | |
| Source Publication | Surface & Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 206Issue:19-20Pages:4119-4125 |
| Abstract | Hydrogenated amorphous carbon films containing Si and Al (a-C:H/(Si, Al)) were deposited on Si(100) substrates at different negative bias voltages, by radio frequency (RF, 13.56 MHz) magnetron sputtering. The chemical composition and structure were detected by means of X-ray photoelectron spectroscopy (XPS) and Raman spectra, respectively. It was found from the results of Raman spectra that the film deposited at zero negative bias voltage was highly hydrogenated, but significant graphitization happened to the films when high bias voltages were applied. The results of atomic force microscope (AFM) showed that the films deposited at moderate negative bias voltage had ultra-smooth surface. The mechanical and tribological properties of the films were measured by nano-indentation test and tribo-meter in ball-on-disk mode, respectively. It was revealed that the negative bias voltage had great impacts on the mechanical properties of the films. The tribological properties of the films were significantly improved when bias voltages were applied on substrates. Particularly, the film deposited at − 200 V performed a super-low friction behavior (0.0085) and long wear life (> 105 revolutions) in ambient air under high Hertz contact stress (as high as 1.6 GPa) though it showed a relatively low hardness. |
| Keyword | Bias Voltage Magnetron Sputtering Surface Morphology Wear Resistance Super-low Friction Amorphous Carbon Film |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.surfcoat.2012.04.006 |
| Funding Organization | the National Natural Science Foundation of China (grant no. 50905177) |
| Indexed By | SCI |
| If | 1.941 |
| Language | 英语 |
| Funding Project | 空间润滑材料组;高温抗磨材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3472 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Liu XQ,Yang J,Hao JY,et al. Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages[J]. Surface & Coatings Technology,2012,206(19-20):4119-4125. |
| APA | Liu XQ.,Yang J.,Hao JY.,Zheng JY.,Gong QY.,...&郝俊英.(2012).Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages.Surface & Coatings Technology,206(19-20),4119-4125. |
| MLA | Liu XQ,et al."Microstructure, mechanical and tribological properties of Si and Al co-doped hydrogenated amorphous carbon films deposited at various bias voltages".Surface & Coatings Technology 206.19-20(2012):4119-4125. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 4119-4125.PDF（1524KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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