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Properties of a-C:H:Si thin films deposited by middle-frequency magnetron sputtering 期刊论文
Applied Surface Science, 2016, 卷号: 379, 页码: 516-522
Authors:  Jiang JL(姜金龙);  Wang, Yubao;  Du, Jinfang;  Yang, Hua;  Hao JY(郝俊英);  Jiang JL(姜金龙);  Hao JY(郝俊英)
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A-c:h:Si Films  Magnetron Sputtering  Structure  Tribological Properties