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Controllable porous fluorinated polyimide thin films for ultralow dielectric constant interlayer dielectric applications 期刊论文
Journal of Macromolecular Science Part A Pure and Applied Chemistry, 2017, 卷号: 54, 期号: 5, 页码: 311-315
Authors:  Wang C(王超);  Wang TM(王廷梅);  Wang QH(王齐华);  Wang C(王超);  Wang TM(王廷梅)
Adobe PDF(659Kb)  |  Favorite  |  View/Download：152/4  |  Submit date：2017/08/28
Fluorinated Polyimide Thin Films  Porous  Silica Microsphere  Template  Ultralow Dielectric Constant