Controllable porous fluorinated polyimide thin films for ultralow dielectric constant interlayer dielectric applications | |
Department | 先进润滑与防护材料研究发展中心 |
Wang C(王超); Wang TM(王廷梅); Wang QH(王齐华); Wang C(王超); Wang TM(王廷梅) | |
The second department | 固体润滑国家重点实验室 |
2017 | |
Source Publication | Journal of Macromolecular Science Part A Pure and Applied Chemistry |
ISSN | 1060-1325 |
Volume | 54Issue:5Pages:311-315 |
Abstract | In this paper, silica microspheres were used as template to prepare porous fluorinated polyimide (FPI) thin films from polyamic acid (PAA, precursor of FPI) and silica colloid solution. The strong hydrogen-bonding interaction between silica microspheres and PAA chains have improved the dispersion of silica microspheres in N,N-Dimethylformamide (DMF) solution, resulting in the high weight content of silica template in PAA/silica colloid solution, and thus giving rise to the formation of porous FPI films with maximum porosity of 35%. The interior microstructures of the resultant porous FPI thin films were investigated. It is found that the porous FPI thin films have interconnected “ink-bottle-type” porous structure, and the pore size, porosity could be precisely controlled by the diameter and weight content of silica microspheres, respectively. Although both the tensile strength and young modules declined with the increasing porosity, the high level void of the porous FPI films endowed the FPI ultralow dielectric constant of 1.84 when the porosity increased to 35%. Furthermore, the mechanical and dielectric properties of the porous FPI films were closely related to the microstructures and porosity, indicating the desired properties could be controlled to meet the application in the microelectronics. |
Keyword | Fluorinated Polyimide Thin Films Porous Silica Microsphere Template Ultralow Dielectric Constant |
Subject Area | 材料科学与物理化学 |
DOI | 10.1080/10601325.2017.1294453 |
Funding Organization | the Nature Science Foundation of China (NSFC) (Grant No. 51403219) |
Indexed By | SCI |
If | 0.963 |
Language | 英语 |
Funding Project | 聚合物自润滑复合材料研究组 |
compositor | 第一作者单位 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.licp.cn/handle/362003/22177 |
Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室(LSL) |
Corresponding Author | Wang C(王超); Wang TM(王廷梅) |
Affiliation | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
Recommended Citation GB/T 7714 | Wang C,Wang TM,Wang QH,et al. Controllable porous fluorinated polyimide thin films for ultralow dielectric constant interlayer dielectric applications[J]. Journal of Macromolecular Science Part A Pure and Applied Chemistry,2017,54(5):311-315. |
APA | Wang C,Wang TM,Wang QH,王超,&王廷梅.(2017).Controllable porous fluorinated polyimide thin films for ultralow dielectric constant interlayer dielectric applications.Journal of Macromolecular Science Part A Pure and Applied Chemistry,54(5),311-315. |
MLA | Wang C,et al."Controllable porous fluorinated polyimide thin films for ultralow dielectric constant interlayer dielectric applications".Journal of Macromolecular Science Part A Pure and Applied Chemistry 54.5(2017):311-315. |
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LZ01030365.pdf(659KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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