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中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究 期刊论文
摩擦学学报, 2008, 卷号: 28, 期号: 2, 页码: 118-122
Authors:  张广安;  王鹏;  陈友明;  王霞;  阎鹏勋;  张俊彦
Adobe PDF(603Kb)  |  Favorite  |  View/Download：137/3  |  Submit date：2013/03/28
中频磁控溅射  Al-dlc薄膜  摩擦磨损性能  Medium Frequency Magnetron Sputtering  Al-dlc Thin Films  Tribological Properties  
Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films 期刊论文
Materials Science and Engineering A, 2007, 卷号: 460-461, 页码: 301-305
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张俊彦)
Adobe PDF(358Kb)  |  Favorite  |  View/Download：278/3  |  Submit date：2013/11/01
Twin Target Medium Frequency Magnetron Sputtering  Crnx Films  Deposition Rate  Structure  Wear Properties