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Properties of a-C:H:Si thin films deposited by middle-frequency magnetron sputtering 期刊论文
Applied Surface Science, 2016, 卷号: 379, 页码: 516-522
Authors:  Jiang JL(姜金龙);  Wang, Yubao;  Du, Jinfang;  Yang, Hua;  Hao JY(郝俊英);  Jiang JL(姜金龙);  Hao JY(郝俊英)
Adobe PDF(1973Kb)  |  Favorite  |  View/Download：119/0  |  Submit date：2016/07/11
A-c:h:Si Films  Magnetron Sputtering  Structure  Tribological Properties  
沉积温度对钛硅共掺杂类金刚石薄膜生长、结构和力学性能的影响 期刊论文
物理学报, 2014, 卷号: 63, 期号: 2, 页码: 028104(1-7)
Authors:  姜金龙;  黄浩;  王琼;  王善民;  魏智强;  杨华;  郝俊英
Adobe PDF(1256Kb)  |  Favorite  |  View/Download：238/6  |  Submit date：2014/12/17
类金刚石薄膜  共掺杂  沉积温度  结构与性能  Diamond-like Carbon Film  Deposition Temperature  Co-doping  Structure And Properties