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Fabrication of high-aspect-ratio polydimethylsiloxane microstructures by reducing the interfacial adhesion in soft lithography 期刊论文
Journal of Micromechanics and Microengineering, 2021, 卷号: 30, 期号: 2021, 页码: 075004
Authors:  Zhou B(周波);  Su B(苏博);  Wurui, Ta;  Zenghui Yang;  Meng JH(孟军虎)
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Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds 期刊论文
Journal of Micromechanics and Microengineering, 2016, 卷号: 26, 期号: 7, 页码: 075001(1-6)
Authors:  Su B(苏博);  Zhang AJ(张爱军);  Meng JH(孟军虎);  Zhang ZZ(张招柱);  Meng JH(孟军虎);  Zhang ZZ(张招柱)
Adobe PDF(996Kb)  |  Favorite  |  View/Download：95/2  |  Submit date：2016/10/24
Ceramics  Microparts  Micropatterns  Soft Lithography  Pdms  Plasma Treatment