| Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds | |
| Department | 先进润滑与防护材料研究发展中心 |
Su B(苏博)1,2 ; Zhang AJ(张爱军)1,2; Meng JH(孟军虎)1; Zhang ZZ(张招柱)1; Meng JH(孟军虎); Zhang ZZ(张招柱)
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| The second department | 固体润滑国家重点实验室 |
| 2016 | |
| Source Publication | Journal of Micromechanics and Microengineering
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| ISSN | 0960-1317 |
| Volume | 26Issue:7Pages:075001(1-6) |
| Abstract | Green alumina microparts were fabricated from a high solid content aqueous suspension by microtransfer molding using air plasma-treated poly(dimethylsiloxane) (PDMS) molds. The wettability of the air plasma-treated PDMS molds spontaneously changed between the hydrophilic and hydrophobic states during the process. Initial hydrophilicity of the air plasma-treated PDMS molds significantly improved the flowability of the concentrated suspension. Subsequent hydrophobic recovery of the air plasma-treated PDMS molds enabled a perfect demolding of the green microparts. Consequently, defect-free microchannel parts of 60 μm and a micromixer with an area of several square centimeters were successfully fabricated. In soft lithography, tuning the wetting behavior of PDMS molds has a great effect on the quality of ceramic microparts. Using wettability-tunable PDMS molds has great potential in producing complex-shaped and large-area ceramic microparts and micropatterns. |
| Keyword | Ceramics Microparts Micropatterns Soft Lithography Pdms Plasma Treatment |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1088/0960-1317/26/7/075001 |
| Funding Organization | the National Natural Science Foundation of China (grant no. 51375473);the Hundred Talent Program (Junhu Meng) of the Chinese Academy of Sciences |
| Indexed By | SCI |
| If | 1.794 |
| Language | 英语 |
| Funding Project | 金属基高温润滑材料组;复合润滑材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/20435 |
| Collection | 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Meng JH(孟军虎); Zhang ZZ(张招柱) |
| Affiliation | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences 2.University of Chinese Academy of Sciences |
| Recommended Citation GB/T 7714 | Su B,Zhang AJ,Meng JH,et al. Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds[J]. Journal of Micromechanics and Microengineering,2016,26(7):075001(1-6). |
| APA | Su B,Zhang AJ,Meng JH,Zhang ZZ,孟军虎,&张招柱.(2016).Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds.Journal of Micromechanics and Microengineering,26(7),075001(1-6). |
| MLA | Su B,et al."Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds".Journal of Micromechanics and Microengineering 26.7(2016):075001(1-6). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| Soft lithography of （996KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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