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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [2]
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Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering
期刊论文
Current Applied Physics, 2011, 卷号: 11, 页码: 771-775
Authors:
Pang XJ(逄显娟)
;
Shi L(石雷)
;
Wang P(王鹏)
;
Xia YQ(夏延秋)
;
Liu WM(刘维民)
Adobe PDF(912Kb)
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View/Download:338/5
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Submit date:2012/09/24
Magnetron Sputtering
Tial-doped A-c:h FIlms
Ti-doped A-c:h FIlms
Microstructure
Tribological Properties
Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering
期刊论文
Surface & Coatings Technology, 2009, 卷号: 203, 页码: 1537-1543
Authors:
逄显娟
;
石雷
;
王鹏
;
张广安
;
刘维民
Adobe PDF(1447Kb)
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View/Download:348/1
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Submit date:2012/11/13
Magnetron Sputtering
Ti–al–c FIlms
Mechanical Properties
Tribological Behaviors