| Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Pang XJ(逄显娟); Shi L(石雷) ; Wang P(王鹏); Xia YQ(夏延秋); Liu WM(刘维民)
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| 2011 | |
| Source Publication | Current Applied Physics
 |
| ISSN | 1567-1739 |
| Volume | 11Pages:771-775 |
| Abstract | Ti-and TiAl-doped a-C:H films were deposited on silicon substrates by magnetron sputtering Ti and TiAl target in argon and methane gas mixture atmosphere. To better elucidate the structural evolution after Al adding, X-ray diffraction, Raman spectroscopy, and X-ray photoelectron spectroscopy were used to comparatively analyze the structural transformation in the as-deposited films. Compared with Ti-doped a-C:H films, the introduction of Al enhanced carbon films graphitization effectively lowered the residual stress from 1.35 GPa to 0.65 GPa. Furthermore, though the hardness of TiAl-doped a-C:H films was moderately lowered, TiAl-doped a-C:H films exhibited higher toughness, lower friction coefficient and lower wear rate. The better tribological performances of TiAl-doped a-C:H films may originate from the formation of graphitized transfer layer during the friction test. |
| Keyword | Magnetron Sputtering Tial-doped A-c:h FIlms Ti-doped A-c:h FIlms Microstructure Tribological Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the Natural Science Foundation of China (Grant NO.50421502);973 Program of China (Grant NO.2007CB607601) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/705 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Liu WM(刘维民) |
| Recommended Citation GB/T 7714 | Pang XJ,Shi L,Wang P,et al. Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering[J]. Current Applied Physics,2011,11:771-775. |
| APA | 逄显娟,石雷,王鹏,夏延秋,&刘维民.(2011).Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering.Current Applied Physics,11,771-775. |
| MLA | 逄显娟,et al."Effects of Al incorporation on the mechanical and tribological properties of Ti-doped a-C:H films deposited by magnetron sputtering".Current Applied Physics 11(2011):771-775. |
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| 2011771-775.PDF（912KB） | 开放获取 | License | View Application Full Text | |||
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