| Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
逄显娟; 石雷 ; 王鹏; 张广安; 刘维民
| |
| 2009 | |
| Source Publication | Surface & Coatings Technology
 |
| ISSN | 0257-8972 |
| Volume | 203Pages:1537-1543 |
| Abstract | Ti–Al–C films were deposited on silicon (100) substrates using magnetron sputtering TiAl target and graphite target in argon atmosphere at various substrate negative bias voltages. The composition, surface morphology, hardness and friction coefficient of the resulting films were characterized using x-ray photoelectron spectroscope, energy dispersive spectrometry, atomic force microscopy, nanoindentation and tribological tester. Results show that the structure and properties of the deposited films strongly depend on the applied substrate negative bias voltage. The Ti–Al–C films deposited at high substrate negative bias voltage show high surface roughness, low hardness and short wear life. In contrast, the Ti–Al–C films deposited without negative bias voltage exhibit uniform and smooth surface, a high hardness of approximately 37 GPa and low friction coefficient and long wear life. Excellent friction and wear behaviors of the Ti–Al–C films deposited without negative bias may be attributed to the dense structure and high hardness. |
| Keyword | Magnetron Sputtering Ti–al–c FIlms Mechanical Properties Tribological Behaviors |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the Natural Science Foundation of China (Grant No. 50421502);973 Program of China (Grant No. 2007CB607601) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 低维材料摩擦学组 ; 空间润滑材料组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2121 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | 刘维民 |
| Recommended Citation GB/T 7714 | 逄显娟,石雷,王鹏,等. Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering[J]. Surface & Coatings Technology,2009,203:1537-1543. |
| APA | 逄显娟,石雷,王鹏,张广安,&刘维民.(2009).Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering.Surface & Coatings Technology,203,1537-1543. |
| MLA | 逄显娟,et al."Influences of bias voltage on mechanical and tribological properties of Ti–Al–C films synthesized by magnetron sputtering".Surface & Coatings Technology 203(2009):1537-1543. |
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| 20091537-1543.pdf（1447KB） | 开放获取 | License | View Application Full Text | |||
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