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The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles 期刊论文
Surface & Coatings Technology, 2012, 卷号: 206, 期号: 19-20, 页码: 3961-3969
Authors:  Lv YH(吕艳红);  Ji L(吉利);  Liu XH(刘晓红);  Li HX(李红轩);  Zhou HD(周惠娣);  Chen JM(陈建敏);  Li HX(李红轩)
Adobe PDF(1880Kb)  |  Favorite  |  View/Download：751/1  |  Submit date：2013/07/12
Craln Films  Microstructure Hardness  Thermal Stability  
Microstructure, mechanical and tribological properties of graphite-like amorphous carbon films prepared by unbalanced magnetron sputtering 期刊论文
Surface and Coatings Technology, 2011, 卷号: 205, 页码: 3058-3065
Authors:  Wang YJ(王永军);  Li HX(李红轩);  Ji L(吉利);  Zhao F(赵飞);  Kong QH(孔庆花);  Wang YX(王永霞);  Liu XH(刘晓红);  Quan WL(权伟龙);  Zhou HD(周惠娣);  Chen JM(陈建敏)
Adobe PDF(1807Kb)  |  Favorite  |  View/Download：389/1  |  Submit date：2012/09/24
Unbalanced Magnetron Sputtering  Bias Voltage  Graphite-like Carbon FIlm  Microstructure  Tribological Properties  
Microstructure and tribological properties of the a-C:H films deposited by magnetron sputtering with CH4 /Ar mixture 期刊论文
Surface and Coatings Technology, 2011, 卷号: 205, 页码: 4577-4581
Authors:  Wang YX(王永霞);  Ye YP(冶银平);  Li HX(李红轩);  Ji L(吉利);  Wang YJ(王永军);  Liu XJ(刘晓军);  Chen JM(陈建敏);  Zhou HD(周惠娣)
Adobe PDF(770Kb)  |  Favorite  |  View/Download：566/3  |  Submit date：2012/09/24
A-c:h FIlm  Magnetron Sputtering  Microstructure  Tribological Property