| The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles | |
| Department | 先进润滑与防护材料研究发展中心 |
Lv YH(吕艳红)1,2; Ji L(吉利)1 ; Liu XH(刘晓红)1; Li HX(李红轩)1; Zhou HD(周惠娣)1; Chen JM(陈建敏)1; Li HX(李红轩)
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| The second department | 固体润滑国家重点实验室 |
| 2012 | |
| Source Publication | Surface & Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 206Issue:19-20Pages:3961-3969 |
| Abstract | The CrAlN films were deposited on silicon and stainless steel substrates by mid-frequency unbalanced magnetron sputtering system. The influence of duty cycle on composition, structure, morphology and properties of the CrAlN films were investigated. The results showed that the CrAlN films presented NaCl-type crystal structure, indicating that the crystalline structures of the CrAlN films were predominantly cubic as that of CrN. Meanwhile, the Al and N concentration, grain size and surface roughness declined with the increase of the duty cycle. The cross section of the films changed from random porous to fine continuous column structure with duty cycle varied from 50% to 80%. The internal stress was changed to the compressive stress and declined with the increase of the duty cycle. The behavior of the incremental hardness as the duty cycle increased was also investigated. In addition, the oxidation resistance of the films deposited at different duty cycle was evaluated after annealed in air at 500–900 °C. The extent of oxidation and the oxidizing state of the element were analyzed by X-ray diffraction, X-ray photoelectron spectroscope and energy dispersive X-ray spectroscopy techniques. The results showed that the thermal stability of the film was influenced by the composition and the microstructure of the film. It was found that the film deposited at 70% had the best oxidation resistance compared with other films, where the ratio of O/N kept still about the 35.22% after annealed at 700 °C. However, the hardness of the film was significantly decreased as the heat–treatment temperature increases, which was attributed to the formation of amorphous oxides and θ-Al2O3 phase as well as the relaxation of the internal stress. |
| Keyword | Craln Films Microstructure Hardness Thermal Stability |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.surfcoat.2012.03.068 |
| Funding Organization | the National Natural Science Foundation of China (Grant no. 50705093);the Innovative Group Foundation from NSFC (Grant no. 50421502) |
| Indexed By | SCI |
| If | 1.941 |
| Language | 英语 |
| Funding Project | 磨损和表面工程组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3459 |
| Collection | 固体润滑国家重点实验室（LSL） 中国科学院材料磨损与防护重点实验室/先进润滑与防护材料研究发展中心 |
| Corresponding Author | Li HX(李红轩) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Lv YH,Ji L,Liu XH,et al. The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles[J]. Surface & Coatings Technology,2012,206(19-20):3961-3969. |
| APA | Lv YH.,Ji L.,Liu XH.,Li HX.,Zhou HD.,...&李红轩.(2012).The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles.Surface & Coatings Technology,206(19-20),3961-3969. |
| MLA | Lv YH,et al."The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles".Surface & Coatings Technology 206.19-20(2012):3961-3969. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 3961-3969.PDF（1880KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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