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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [2]
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甲烷流量对中频磁控溅射制备TiSi-C:H薄膜生长和性能的影响(英文)
期刊论文
稀有金属材料与工程, 2014, 卷号: 43, 期号: 10, 页码: 2305-2310
Authors:
姜金龙
;
陈娣
;
王琼
;
黄浩
;
朱维君
;
郝俊英
Adobe PDF(937Kb)
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View/Download:116/0
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Submit date:2016/02/15
A-c:h Films
Middle-frequency Magnetron Sputtering
Mechanical Property
Tribological Property
A-c:H薄膜
中频磁控溅射
力学性能
摩擦性能
不同Ti靶电流对Ti掺杂类石墨碳膜的结构和性能的影响(英文)
期刊论文
Transactions of Nonferrous Metals society of China, 2012, 卷号: 22, 期号: 6, 页码: 1372-1380
Authors:
Wang YX(王永欣)
;
Wang LP(王立平)
;
Xue QJ(薛群基)
;
王立平
Adobe PDF(1543Kb)
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View/Download:227/2
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Submit date:2013/07/12
Ti-doped Graphite-like Carbon Film
Microstructure
Tribological Performance
Target Current
Ti掺杂类石墨碳膜
微观结构
摩擦学性能
靶电流