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不同Ti靶电流对Ti掺杂类石墨碳膜的结构和性能的影响(英文) 期刊论文
Transactions of Nonferrous Metals society of China, 2012, 卷号: 22, 期号: 6, 页码: 1372-1380
Authors:  Wang YX(王永欣);  Wang LP(王立平);  Xue QJ(薛群基);  王立平
Adobe PDF(1543Kb)  |  Favorite  |  View/Download：227/2  |  Submit date：2013/07/12
Ti-doped Graphite-like Carbon Film  Microstructure  Tribological Performance  Target Current  Ti掺杂类石墨碳膜  微观结构  摩擦学性能  靶电流