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磁控溅射法制备氮化物硬质膜及其性能研究 学位论文
: 中国科学院研究生院, 2012
Authors:  郑建云
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氮化物硬质膜  磁控溅射  多层复合  微观结构  摩擦与磨损  Hard Nitride-based Films  Magnetron Sputtering  Multilayercomposite  Microstructure  Friction And Wear  
A thick TiN/TiCN multilayer film by DC magnetron sputtering 期刊论文
Surface & Coatings Technology, 2012, 卷号: 209, 页码: 110-116
Authors:  Zheng JY(郑建云);  Hao JY(郝俊英);  Liu XQ(刘小强);  Gong QY(龚秋雨);  Liu WM(刘维民);  Hao JY(郝俊英)
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Tin/ticn Multilayer  Thick Film  Microstructure And Properties  Friction And Wear  
Properties of TiN/TiCN multilayer films by direct current magnetron sputtering 期刊论文
Journal of Physics D: Applied Physics, 2012, 卷号: 45, 期号: 9, 页码: 095303(1-9)
Authors:  Zheng JY(郑建云);  Hao JY(郝俊英);  Liu XQ(刘小强);  Liu WM(刘维民);  Hao JY(郝俊英)
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