| Properties of TiN/TiCN multilayer films by direct current magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Zheng JY(郑建云)1,2 ; Hao JY(郝俊英)1; Liu XQ(刘小强)1,2; Liu WM(刘维民)1; Hao JY(郝俊英)
| |
| 2012 | |
| Source Publication | Journal of Physics D: Applied Physics
 |
| ISSN | 0022-3727 |
| Volume | 45Issue:9Pages:095303(1-9) |
| Abstract | In this work, a TiN/TiCN multilayer film was deposited by direct current magnetron sputtering. Its thickness was about 9675 nm and the bilayer numbers were 10. The composition, crystalline structure and amorphous carbon (a-C) phase of the film were investigated by x-ray photoelectron spectroscopy, x-ray diffraction and Raman spectroscopy. Field emission scanning electron microscopy was employed to observe the inner structure of the film. The TiCN layer exhibited a glass-like structure and the TiN layer presented a columnar structure. The adhesion force between the film and the substrate was 37.8 N determined by scratch tests. The hardness of the uppermost TiCN layer and the total film was 34.22 GPa and 27.22 GPa obtained by nano-indentation tests, respectively. In addition, the TiN/TiCN multilayer thick film showed different types of tribological behaviour against Si3N4 balls and steel balls. The mean coefficient of friction and the wear rate of the film were about 0.14 and 1.15 × 10−6 mm3 N−1 m−1 when the film slid against Si3N4 balls for 1 h. |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1088/0022-3727/45/9/095303 |
| Funding Organization | the National Nature Science Foundation of China (50905177);the National 973 Project of China (2007CB607601) |
| Indexed By | SCI |
| If | 2.528 |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3385 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Zheng JY,Hao JY,Liu XQ,et al. Properties of TiN/TiCN multilayer films by direct current magnetron sputtering[J]. Journal of Physics D: Applied Physics,2012,45(9):095303(1-9). |
| APA | Zheng JY,Hao JY,Liu XQ,Liu WM,&郝俊英.(2012).Properties of TiN/TiCN multilayer films by direct current magnetron sputtering.Journal of Physics D: Applied Physics,45(9),095303(1-9). |
| MLA | Zheng JY,et al."Properties of TiN/TiCN multilayer films by direct current magnetron sputtering".Journal of Physics D: Applied Physics 45.9(2012):095303(1-9). |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 095303.PDF（1327KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment