| A thick TiN/TiCN multilayer film by DC magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Zheng JY(郑建云)1,2 ; Hao JY(郝俊英)1; Liu XQ(刘小强)1,2; Gong QY(龚秋雨)1,2; Liu WM(刘维民)1; Hao JY(郝俊英)
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| 2012 | |
| Source Publication | Surface & Coatings Technology
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| ISSN | 0257-8972 |
| Volume | 209Pages:110-116 |
| Abstract | A thick TiN/TiCN multilayer film was prepared on steel and silicon (Si) substrates using a DC magnetron sputtering technique under a high deposition rate. Its thickness reached about 23.5 μm and it was composed of 30 bilayer numbers. X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), cross-sectional high resolution transmission electron microscopy (HRTEM) and field emitted scanning electron microscopy (FESEM) were employed to characterize the composition and structure of the film on the Si substrates. It was found that the inner TiCN layers consisted of a mixture nanocrystalline TiCN phase and amorphous carbon, and the TiN layers showed nano-columnar structure. The adhesion force and the hardness of the film deposited on steel substrates were 29.0 N and 21.4 GPa, respectively. It was revealed that the thick film still maintained the excellent mechanical properties. The film sliding against steel ball had good wear resistance and very long service life (> 11 h) in ambient air under high rotate speed and large load. |
| Keyword | Tin/ticn Multilayer Thick Film Microstructure And Properties Friction And Wear |
| Subject Area | 材料科学与物理化学 |
| DOI | 10.1016/j.surfcoat.2012.08.045 |
| Funding Organization | the National Nature Science Foundation of China (50905177) |
| Indexed By | SCI |
| If | 1.941 |
| Language | 英语 |
| Funding Project | 空间润滑材料组 |
| compositor | 第一作者单位 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/3471 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Hao JY(郝俊英) |
| Affiliation | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China |
| Recommended Citation GB/T 7714 | Zheng JY,Hao JY,Liu XQ,et al. A thick TiN/TiCN multilayer film by DC magnetron sputtering[J]. Surface & Coatings Technology,2012,209:110-116. |
| APA | Zheng JY,Hao JY,Liu XQ,Gong QY,Liu WM,&郝俊英.(2012).A thick TiN/TiCN multilayer film by DC magnetron sputtering.Surface & Coatings Technology,209,110-116. |
| MLA | Zheng JY,et al."A thick TiN/TiCN multilayer film by DC magnetron sputtering".Surface & Coatings Technology 209(2012):110-116. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 110-116.PDF（1636KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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