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The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering 期刊论文
Applied Surface Science, 2008, 卷号: 254, 页码: 5012-5015
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wu ZG(吴志国);  Wang J(王君);  Chen JT(陈江涛)
Adobe PDF(574Kb)  |  Favorite  |  View/Download:79/0  |  Submit date:2013/03/28
Copper Nitride  Thin FIlms  Hydrogen  Structure  Thermal Properties  
金属复合对 CrN薄膜的结构及摩擦磨损性能的影响 期刊论文
润滑与密封, 2008, 卷号: 33, 期号: 5, 页码: 30-32
Authors:  王静;  张广安;  王立平
Adobe PDF(619Kb)  |  Favorite  |  View/Download:195/0  |  Submit date:2013/03/28
Crn薄膜  磁控溅射  金属复合  摩擦磨损  Crn Coatings  Magnetron Sputtering  Metal Alloyed  Wear Properties  
中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究 期刊论文
摩擦学学报, 2008, 卷号: 28, 期号: 2, 页码: 118-122
Authors:  张广安;  王鹏;  陈友明;  王霞;  阎鹏勋;  张俊彦
Adobe PDF(603Kb)  |  Favorite  |  View/Download:139/3  |  Submit date:2013/03/28
中频磁控溅射  Al-dlc薄膜  摩擦磨损性能  Medium Frequency Magnetron Sputtering  Al-dlc Thin Films  Tribological Properties  
The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films 期刊论文
Surface and Coatings Technology, 2008, 卷号: 202, 页码: 2684-2689
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wang P(王鹏);  Chen YM(陈友明);  Zhang JY(张君英);  Wang LP(王立平);  Zhang JY(张俊彦)
Adobe PDF(1278Kb)  |  Favorite  |  View/Download:128/2  |  Submit date:2013/03/28
Al-containing Hydrogenated Amorphous Carbon  Magnetron Sputtering  Applied Substrate Pulse Bias  Hardness  Wear Test