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Structure evolution and mechanical properties enhancement of Al/AlN multilayer 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 8835-8840
Authors:  Zhang GA(张广安);  Wu ZG(吴志国);  Wang MX(王明旭);  Fan XY(范晓彦);  Wang J(王君);  Yan PX(阎鹏勋)
Adobe PDF(869Kb)  |  Favorite  |  View/Download：85/0  |  Submit date：2013/11/01
Magnetron Sputtering  Al/aln Multilayer  Structure  Hardness  Wear Properties  
Ripple surface generated on hydrogenated amorphous carbon nitride films 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4099-4102
Authors:  Wang CB(王成兵);  Yang SR(杨生荣);  Zhang JY(张俊彦)
Adobe PDF(536Kb)  |  Favorite  |  View/Download：176/2  |  Submit date：2013/11/01
Carbon Nitride Films  Ripple Morphology  
The effect of applied negative bias voltage on the structure of Ti-doped a-C:H films deposited by FCVA 期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 3722-3726
Authors:  Wang P(王鹏);  Wang X(王霞);  Chen YM(陈友明);  Zhang GA(张广安);  Liu WM(刘维民);  Zhang JY(张俊彦)
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Hydrogenated Amorphous Carbon (A-c:h) Films  Applied Bias Voltage  Filtered Cathodic Vacuum Arc (Fcva)