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In-situ stress suppression of hydrogenated a-CNx film prepared via Ar gas introduction 期刊论文
Surface and Interface Analysis, 2017, 卷号: 49, 期号: 5, 页码: 370-375
Authors:  Wang, Qi;  He, Deyan;  Zhang JY(张俊彦)
Adobe PDF(434Kb)  |  Favorite  |  View/Download：127/4  |  Submit date：2017/05/10
Amorphous Carbon  Carbon Nitride Films  Stress  Raman  
Effects of negative bias on the structural,topological and tribological properties of amorphous carbon films prepared by magnetron sputtering 期刊论文
Surface and Interface Analysis, 2011, 卷号: 43, 页码: 1218-1223
Authors:  Wang Z(王舟);  Wang CB(王成兵);  Zhang B(张斌);  Wang Q(王琦);  Zhang JY(张俊彦)
Adobe PDF(336Kb)  |  Favorite  |  View/Download：306/3  |  Submit date：2012/09/24
Amorphous Carbon FIlms  Magnetron Sputtering  Tribological