| Effects of negative bias on the structural,topological and tribological properties of amorphous carbon films prepared by magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
Wang Z(王舟); Wang CB(王成兵); Zhang B(张斌) ; Wang Q(王琦); Zhang JY(张俊彦)
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| 2011 | |
| Source Publication | Surface and Interface Analysis
 |
| ISSN | 0142-2421 |
| Volume | 43Pages:1218-1223 |
| Abstract | Amorphous carbonfilmswerepreparedinamagnetronsputteringsystematdifferentd.c.negative substratebiases (−50,−100, −150, −200 and −250 V). The surface roughness, hardness and tribological properties of as-deposited films were investigated based on the films’ structural evolution. Compared with the films deposited at the negative bias of −50 and −250 V, the microstructure and bond configuration of the films deposited at negative bias of−150 V favored amore graphite-like structure, which had themaximumof graphiticclusters and ordering structures;meanwhile, the films deposited at bias of−150 V showed the minimum coefficient of friction (COF) in air, while the wear rate showed a decrease of two orders of magnitude. The tribotesting results were attributed to the increase of graphitic domains of amorphous carbon films which decreased the interfacial shear force and lowered the COF. The uniform and ordering structure induced steady and smooth friction curves. |
| Keyword | Amorphous Carbon FIlms Magnetron Sputtering Tribological |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (Grant Nos 50721062;50823008;50975273;51005110);the Chinese Ministry of Science and Technology (863 Program with Grant NO.2007AA03Z338) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 纳米润滑研究组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/830 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang JY(张俊彦) |
| Recommended Citation GB/T 7714 | Wang Z,Wang CB,Zhang B,et al. Effects of negative bias on the structural,topological and tribological properties of amorphous carbon films prepared by magnetron sputtering[J]. Surface and Interface Analysis,2011,43:1218-1223. |
| APA | 王舟,王成兵,张斌,王琦,&张俊彦.(2011).Effects of negative bias on the structural,topological and tribological properties of amorphous carbon films prepared by magnetron sputtering.Surface and Interface Analysis,43,1218-1223. |
| MLA | 王舟,et al."Effects of negative bias on the structural,topological and tribological properties of amorphous carbon films prepared by magnetron sputtering".Surface and Interface Analysis 43(2011):1218-1223. |
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| 20111218-1223.PDF（336KB） | 开放获取 | License | View Application Full Text | |||
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