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Structure and mechanical properties of reactive sputtering CrSiN films 期刊论文
Applied Surface Science, 2009, 卷号: 255, 页码: 4425-4429
Authors:  Zhang GA(张广安);  Wang LP(王立平);  Wang SC(王顺才);  Yan PX(阎鹏勋);  Xue QJ(薛群基)
Adobe PDF(464Kb)  |  Favorite  |  View/Download：209/5  |  Submit date：2012/11/13
Crsin FIlms  Magnetron Sputtering  Microstructure  Mechanical Properties  
The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering 期刊论文
Applied Surface Science, 2008, 卷号: 254, 页码: 5012-5015
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wu ZG(吴志国);  Wang J(王君);  Chen JT(陈江涛)
Adobe PDF(574Kb)  |  Favorite  |  View/Download：79/0  |  Submit date：2013/03/28
Copper Nitride  Thin FIlms  Hydrogen  Structure  Thermal Properties