| Structure and mechanical properties of reactive sputtering CrSiN films | |
| Department | 固体润滑国家重点实验室 |
Zhang GA(张广安) ; Wang LP(王立平); Wang SC(王顺才); Yan PX(阎鹏勋); Xue QJ(薛群基)
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| 2009 | |
| Source Publication | Applied Surface Science
 |
| ISSN | 0169-4332 |
| Volume | 255Pages:4425-4429 |
| Abstract | CrSiN films with various Si contents were deposited by reactive magnetron sputtering using the co- deposition of Cr and Si targets in the presence of the reactive gas mixture. Comparative studies on microstructure and mechanical properties between CrN and CrSiN films with various Si contents were carried out. The structure of the CrSiN filmswas found to change fromcrystalline to amorphous structure as the Si contents increase. Amorphous phase of Si3N4 compound was suggested to exist in the CrSiN film. The growth of films has been observed from continuous columnar structure, granular structure to glassy-like appearance morphology with the increase of silicon content. The film fracture changed from continuous columnar structure, granular structure to glassy-like appearance morphology with the increase of silicon content. Two hardness peaks of the films as function of Si contents have been discussed. |
| Keyword | Crsin FIlms Magnetron Sputtering Microstructure Mechanical Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (No. 50772115;No. 50823008) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 低维材料摩擦学组 |
| Citation statistics | |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2015 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | Zhang GA(张广安) |
| Recommended Citation GB/T 7714 | Zhang GA,Wang LP,Wang SC,et al. Structure and mechanical properties of reactive sputtering CrSiN films[J]. Applied Surface Science,2009,255:4425-4429. |
| APA | 张广安,王立平,王顺才,阎鹏勋,&薛群基.(2009).Structure and mechanical properties of reactive sputtering CrSiN films.Applied Surface Science,255,4425-4429. |
| MLA | 张广安,et al."Structure and mechanical properties of reactive sputtering CrSiN films".Applied Surface Science 255(2009):4425-4429. |
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| File Name/Size | DocType | Version | Access | License | ||
| 20094425-4429.PDF（464KB） | 开放获取 | License | View Application Full Text | |||
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