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Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering 期刊论文
Journal of Alloys and Compounds, 2009, 卷号: 486, 页码: 227-232
Authors:  张广安;  王立平;  阎鹏勋;  薛群基
Adobe PDF(1573Kb)  |  Favorite  |  View/Download：151/2  |  Submit date：2012/11/13
Magnetron Sputtering  Cr–b–n FIlms  Structure  Mechanical Properties  
The effect of hydrogen on copper nitride thin films deposited by magnetron sputtering 期刊论文
Applied Surface Science, 2008, 卷号: 254, 页码: 5012-5015
Authors:  Zhang GA(张广安);  Yan PX(阎鹏勋);  Wu ZG(吴志国);  Wang J(王君);  Chen JT(陈江涛)
Adobe PDF(574Kb)  |  Favorite  |  View/Download：79/0  |  Submit date：2013/03/28
Copper Nitride  Thin FIlms  Hydrogen  Structure  Thermal Properties