| Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering | |
| Department | 固体润滑国家重点实验室 |
张广安 ; 王立平; 阎鹏勋; 薛群基
| |
| 2009 | |
| Source Publication | Journal of Alloys and Compounds
 |
| ISSN | 0925-8388 |
| Volume | 486Pages:227-232 |
| Abstract | Cr–B–N films with various B contents were deposited by reactive magnetron sputtering from the co- deposition of Cr and B targets in the presence of the reactive gas mixture. Comparative studies on microstructure and mechanical properties between CrN and Cr–B–N films with various B contents were conducted. The addition of B to CrN films caused a decrease of the crystallization of the films, while the B existed mainly as amorphous phase of BN compound in the CrBN films. The mechanical properties were also improved. And the Cr–B–N films with 6.1 at.% B content showed highest hardness and lowest wear rate. |
| Keyword | Magnetron Sputtering Cr–b–n FIlms Structure Mechanical Properties |
| Subject Area | 材料科学与物理化学 |
| Funding Organization | the National Natural Science Foundation of China (No. 50772115);the 863 Program of Chinese Ministry of Science and Technology (No. 2009AA03Z105) |
| Indexed By | SCI |
| Language | 英语 |
| Funding Project | 低维材料摩擦学组 |
| Document Type | 期刊论文 |
| Identifier | http://ir.licp.cn/handle/362003/2052 |
| Collection | 固体润滑国家重点实验室（LSL） |
| Corresponding Author | 张广安 |
| Recommended Citation GB/T 7714 | 张广安,王立平,阎鹏勋,等. Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering[J]. Journal of Alloys and Compounds,2009,486:227-232. |
| APA | 张广安,王立平,阎鹏勋,&薛群基.(2009).Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering.Journal of Alloys and Compounds,486,227-232. |
| MLA | 张广安,et al."Structure and mechanical properties of Cr–B–N films deposited by reactive magnetron sputtering".Journal of Alloys and Compounds 486(2009):227-232. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2009227-232.PDF（1573KB） | 开放获取 | License | View Application Full Text | |||
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