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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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中国科学院材料磨损与... [4]
固体润滑国家重点实验... [2]
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Applied Su... [1]
Surface an... [1]
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磨损和表面工程组 [4]
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the Nation... [2]
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王永霞 [3]
冶银平 [2]
吉利 [2]
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李红轩 [2]
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2011 [4]
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Date Issued:2011
Funding Project:磨损和表面工程组
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氮化铬硬质膜的制备及其性能研究
学位论文
: 中国科学院研究生院, 2011
Authors:
孔庆花
Adobe PDF(13743Kb)
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Submit date:2012/11/09
Crnx薄膜
中频脉冲磁控溅射
工艺参数
微观结构
摩擦学性能
Crnx Films
Medium Frequency Pulse Magnetron Sputtering
Deposition Parameters
Microstructure
Tribological Properties
磁控溅射法制备含氢非晶碳膜及其结构和性能研究
学位论文
: 中国科学院研究生院, 2011
Authors:
王永霞
Adobe PDF(2699Kb)
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View/Download:302/0
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Submit date:2012/11/09
含氢非晶碳膜
磁控溅射法
内应力
热稳定性
Hydrogenated Amorphous Carbon Film
Magnetron Sputtering
Internal Stress
Thermal Stability
Microstructure and tribological properties of the a-C:H films deposited by magnetron sputtering with CH4 /Ar mixture
期刊论文
Surface and Coatings Technology, 2011, 卷号: 205, 页码: 4577-4581
Authors:
Wang YX(王永霞)
;
Ye YP(冶银平)
;
Li HX(李红轩)
;
Ji L(吉利)
;
Wang YJ(王永军)
;
Liu XJ(刘晓军)
;
Chen JM(陈建敏)
;
Zhou HD(周惠娣)
Adobe PDF(770Kb)
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Submit date:2012/09/24
A-c:h FIlm
Magnetron Sputtering
Microstructure
Tribological Property
A magnetron sputtering technique to prepare a-C:H films: Effect of substrate bias
期刊论文
Applied Surface Science, 2011, 卷号: 257, 页码: 1990-1995
Authors:
Wang YX(王永霞)
;
Ye YP(冶银平)
;
Li HX(李红轩)
;
Ji L(吉利)
;
Chen JM(陈建敏)
;
Zhou HD(周惠娣)
Adobe PDF(1086Kb)
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View/Download:324/1
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Submit date:2012/09/24
A-c:h FIlm
Magnetron Sputtering
Substrate Bias
Microstructure
Tribological Property