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Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
Journal of Non-Crystalline Solids, 2013, 卷号: 378, 页码: 177-180
Authors:  Wang LQ(王凌倩);  Wang, Weiyan;  Huang, Junjun;  Zeng, Yuheng;  Tan, Ruiqin;  Song, Weijie;  Chen JM(陈建敏);  Chen JM(陈建敏)
Adobe PDF(553Kb)  |  Favorite  |  View/Download：96/1  |  Submit date：2015/10/19
Argon Ion Beam Assisted Magnetron Sputtering  Boron-doped A-si:h Thin Film  Dark Conductivity  
Effect of vacuum annealing on the microstructure and tribological behavior of hydrogenated amorphous carbon films prepared by magnetron sputtering 期刊论文
Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2013, 卷号: 227, 期号: 7, 页码: 729-737
Authors:  Wu YX(吴艳霞);  Li HX(李红轩);  Ji L(吉利);  Liu L(刘流);  Ye YP(冶银平);  Chen JM(陈建敏);  Zhou HD(周惠娣);  Ye YP(冶银平)
Adobe PDF(817Kb)  |  Favorite  |  View/Download：425/3  |  Submit date：2013/12/05
Magnetron Sputtering  A-c:h Film  Vacuum Annealing  Microstructure  Tribological Behavior