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中国科学院兰州化学物理研究所机构知识库
KMS Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences
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固体润滑国家重点实验... [3]
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Applied Su... [2]
Materials ... [1]
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纳米润滑研究组 [1]
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the “Hundr... [1]
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阎鹏勋 [3]
张广安 [2]
范晓彦 [2]
刘洋 [1]
吴志国 [1]
岳光辉 [1]
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英语 [3]
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2007 [3]
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Creator:阎鹏勋
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Date Issued:2007
Language:英语
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Research on the properties of ZnO thin films deposited by using filtered cathodic arc plasma technique on glass substrate under different flow rate of O2
期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 4000-4005
Authors:
Li C(李春)
;
Li XC(李晓春)
;
Yan PX(阎鹏勋)
;
Chong EM(崇二敏)
;
Liu Y(刘洋)
;
Yue GH(岳光辉)
;
Fan XY(范晓彦)
Adobe PDF(578Kb)
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View/Download:69/1
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Submit date:2013/11/01
Zno Thin Films
Filtered Cathodic Arc Plasma
Tensile Stress
Electrical Resistivity
Photoluminescence
Structure evolution and mechanical properties enhancement of Al/AlN multilayer
期刊论文
Applied Surface Science, 2007, 卷号: 253, 页码: 8835-8840
Authors:
Zhang GA(张广安)
;
Wu ZG(吴志国)
;
Wang MX(王明旭)
;
Fan XY(范晓彦)
;
Wang J(王君)
;
Yan PX(阎鹏勋)
Adobe PDF(869Kb)
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View/Download:85/0
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Submit date:2013/11/01
Magnetron Sputtering
Al/aln Multilayer
Structure
Hardness
Wear Properties
Influence of nitrogen content on the structural, electrical and mechanical properties of CrNx thin films
期刊论文
Materials Science and Engineering A, 2007, 卷号: 460-461, 页码: 301-305
Authors:
Zhang GA(张广安)
;
Yan PX(阎鹏勋)
;
Wang P(王鹏)
;
Chen YM(陈友明)
;
Zhang JY(张俊彦)
Adobe PDF(358Kb)
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Submit date:2013/11/01
Twin Target Medium Frequency Magnetron Sputtering
Crnx Films
Deposition Rate
Structure
Wear Properties